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Silicon nanowire sensor by mix and match lithography process: Fabrication and characterization
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10.1063/1.4769131
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/content/aip/proceeding/aipcp/10.1063/1.4769131
2012-11-27
2014-07-24
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Scitation: Silicon nanowire sensor by mix and match lithography process: Fabrication and characterization
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.4769131
10.1063/1.4769131
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