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Estimation of sputtering damages on a magnetron H ion source induced by Cs+ and H+ ions
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10.1063/1.4792773
/content/aip/proceeding/aipcp/10.1063/1.4792773
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.4792773
/content/aip/proceeding/aipcp/10.1063/1.4792773
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/content/aip/proceeding/aipcp/10.1063/1.4792773
2013-02-08
2014-11-26
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229c8a00d8fe88cf152414eb5d9cd803 conferences.conference_paperzxybnytfddd
Scitation: Estimation of sputtering damages on a magnetron H− ion source induced by Cs+ and H+ ions
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.4792773
10.1063/1.4792773
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