- Conference date: 14–17 May 2012
- Location: Saint Petersburg, Russia
The surface shape and the absolute optical thickness of a fused-silica glass parallel plate were measured by wavelength tuning interferometry. An excess fractions method combined with the Fourier based frequency analysis removed a systematic error. The interference orders of the optical thickness fringes were finally estimated, which resulted in an accuracy of a few nanometers for the optical thickness measurement.
- Error analysis
- Fourier analysis
- Frequency analyzers
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