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Characterization of thin on Si by spectroscopic ellipsometry, neutron reflectometry, and x-ray reflectometry
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/content/aip/proceeding/aipcp/10.1063/1.56796
1998-11-24
2014-10-21
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229c8a00d8fe88cf152414eb5d9cd803 conferences.conference_paperzxybnytfddd
Scitation: Characterization of thin SiO2 on Si by spectroscopic ellipsometry, neutron reflectometry, and x-ray reflectometry
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.56796
10.1063/1.56796
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