- Conference date: 23-27 March 1998
- Location: Gaithersburg, Maryland (USA)
This paper describes a long term view for semiconductor metrology and inspection which, at $2.3 billion, was approximately 10% of the front end equipment market in 1997. Topics covered include consumption patterns for each of the major categories of measurement equipment, consolidation among capital equipment suppliers, and the business implications of integrated measurement and sensing in next generation process equipment.
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