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Preparation of a-Si:H and a-SiGe:H nip cells at high rates using a 70 MHz VHF PECVD technique
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10.1063/1.57977
/content/aip/proceeding/aipcp/10.1063/1.57977
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.57977
/content/aip/proceeding/aipcp/10.1063/1.57977
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/content/aip/proceeding/aipcp/10.1063/1.57977
1999-03-05
2014-11-29
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229c8a00d8fe88cf152414eb5d9cd803 conferences.conference_paperzxybnytfddd
Scitation: Preparation of a-Si:H and a-SiGe:H nip cells at high rates using a 70 MHz VHF PECVD technique
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.57977
10.1063/1.57977
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