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ION IMPLANTATION TECHNOLOGY: 17th International Conference on Ion Implantation Technology

  • Conference date: 8–13 June 2008
  • Location: Monterey (California)
  • ISBN: 978-0-7354-0597-4
  • Editors: Edmund G. Seebauer , Susan B. Felch , Amitabh Jain  and Yevgeniy V. Kondratenko
  • Volume number: 1066
  • Published: 03 November 2008
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Scitation: Scitation|ION IMPLANTATION TECHNOLOGY: 17th International Conference on Ion Implantation Technology
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/1066
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