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FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2009

  • Conference date: 11–15 May 2009
  • Location: Albany (New York)
  • ISBN: 978-0-7354-0712-1
  • Editors: Erik M. Secula , David G. Seiler , Rajinder P. Khosla , Dan Herr , C. Michael Garner , Robert McDonald  and Alain C. Diebold
  • Volume number: 1173
  • Published: 28 September 2009
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Scitation: FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2009
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/1173
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