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ION IMPLANTATION TECHNOLOGY 2101: 18th International Conference on Ion Implantation Technology IIT 2010

  • Conference date: 6–11 June 2010
  • Location: Kyoto, (Japan)
  • ISBN: 978-0-7354-0876-0
  • Editors: Jiro Matsuo , Masataka Kase , Takaaki Aoki  and Toshio Seki
  • Volume number: 1321
  • Published: 07 January 2011
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Scitation: ION IMPLANTATION TECHNOLOGY 2101: 18th International Conference on Ion Implantation Technology IIT 2010
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/1321
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