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The 1998 international conference on characterization and metrology for ULSI technology

  • Conference date: 23-27 March 1998
  • Location: Gaithersburg, Maryland (USA)
  • ISBN: 1-56396-753-7
  • Editors: David G. Seiler , Alain C. Diebold , W. Murray Bullis , Thomas J. Shaffner , Robert McDonald  and E. Jane Walters
  • Volume number: 449
  • Published: 24 November 1998
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Scitation: The 1998 international conference on characterization and metrology for ULSI technology
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/449
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