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CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY 2000

  • Conference date: 26-29 June 2000
  • Location: Gaithersburg, Maryland (USA)
  • ISBN: 1-56396-967-X
  • Editors: David G. Seiler , Patrick J. Smith , Alain C. Diebold , Robert McDonald , W. Murray Bullis , Thomas J. Shaffner  and Erik M. Secula
  • Volume number: 550
  • Published: 29 January 2001
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Scitation: CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY 2000
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/550
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