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CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY: 2003 International Conference on Characterization and Metrology for ULSI Technology

  • Conference date: 24-28 March 2003
  • Location: Austin, Texas (USA)
  • ISBN: 0-7354-0152-7
  • Editors: David G. Seiler , Alain C. Diebold , Thomas J. Shaffner , Robert McDonald , Stefan Zollner , Rajinder P. Khosla  and Erik M. Secula
  • Volume number: 683
  • Published: 30 September 2003
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Scitation: CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY: 2003 International Conference on Characterization and Metrology for ULSI Technology
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/683
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