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CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY 2005

  • Conference date: 15-18 March 2005
  • Location: Richardson, Texas (USA)
  • ISBN: 0-7354-0277-9
  • Editors: David G. Seiler , Alain C. Diebold , Robert McDonald , Caroline R. Ayre , Rajinder P. Khosla , Stefan Zollner  and Erik M. Secula
  • Volume number: 788
  • Published: 09 September 2005
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Scitation: CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY 2005
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/788
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