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CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2007 International Conference on Frontiers of Characterization and Metrology

  • Conference date: 27–29 March 2007
  • Location: Gaithersburg (MD)
  • ISBN: 978-0-7354-0441-0
  • Editors: David G. Seiler , Alain C. Diebold , Robert McDonald , C. Michael Garner , Dan Herr , Rajinder P. Khosla  and Erik M. Secula
  • Volume number: 931
  • Published: 26 September 2007
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Scitation: CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2007 International Conference on Frontiers of Characterization and Metrology
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/931
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