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Visualizing acoustic displacements of capacitive micromachined transducers using an interferometric microscope
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1.R. A. Noble, A. R. D. Jones, T. J. Robertson, D. A. Hutchins, and D. R. Billson, “Novel wide bandwidth micromachined ultrasonic transducers,” IEEE Trans. Ultrason. Ferroelectr. Freq. Control 48, 14951507 (2001).
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4.M. R. Hart, R. A. Conant, K. Y. Lau, and R. S. Muller, “Stroboscopic phase-shifting interferometry for dynamic characterization of optical MEMS,” Proc. SPIE 3749, 468469 (1999).
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6.W. Hemmert, M. S. Mermelstein, and D. M. Freeman, “Nanometer resolution of three-dimensional motions using video interference microscopy,” Proceedings of the 12th IEEE conference Micro Electro Mechanical Systems (MEMS) (1999), pp. 302–308.
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2005-01-25
2014-08-29
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Scitation: Visualizing acoustic displacements of capacitive micromachined transducers using an interferometric microscope
http://aip.metastore.ingenta.com/content/asa/journal/arlo/6/2/10.1121/1.1851391
10.1121/1.1851391
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