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/content/asa/journal/arlo/6/2/10.1121/1.1851391
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1.R. A. Noble, A. R. D. Jones, T. J. Robertson, D. A. Hutchins, and D. R. Billson, “Novel wide bandwidth micromachined ultrasonic transducers,” IEEE Trans. Ultrason. Ferroelectr. Freq. Control 48, 14951507 (2001).
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/content/asa/journal/arlo/6/2/10.1121/1.1851391
2005-01-25
2016-12-06
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
/content/realmedia?fmt=ahah&adPositionList=
&advertTargetUrl=//oascentral.aip.org/RealMedia/ads/&sitePageValue=asadl.org/arlo/6/2/10.1121/1.1851391&pageURL=http://scitation.aip.org/content/asa/journal/arlo/6/2/10.1121/1.1851391'
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