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1.R. A. Noble, A. R. D. Jones, T. J. Robertson, D. A. Hutchins, and D. R. Billson, “Novel wide bandwidth micromachined ultrasonic transducers,” IEEE Trans. Ultrason. Ferroelectr. Freq. Control 48, 14951507 (2001).
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5.C. Rembe, R. Kant, and R. S. Muller, “Optical measurement methods to study dynamic behaviour in MEMS,” Proc. SPIE 4400, 127137 (2001).
6.W. Hemmert, M. S. Mermelstein, and D. M. Freeman, “Nanometer resolution of three-dimensional motions using video interference microscopy,” Proceedings of the 12th IEEE conference Micro Electro Mechanical Systems (MEMS) (1999), pp. 302–308.
7.Wyko Surface Profilers—Technical Reference Manual, Wyko Corporation, 1996.

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