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Visualizing acoustic displacements of capacitive micromachined transducers using an interferometric microscope
1.R. A. Noble, A. R. D. Jones, T. J. Robertson, D. A. Hutchins, and D. R. Billson, “Novel wide bandwidth micromachined ultrasonic transducers,” IEEE Trans. Ultrason. Ferroelectr. Freq. Control 48, 1495–1507 (2001).
2.M. I. Haller and B. T. Khuri-Yakub, “A Surface Micromachined Electrostatic Ultrasonic Air Transducer,” IEEE Trans. Ultrason. Ferroelectr. Freq. Control 43, 1–6 (1996).
3.C. Q. Davis and D. M. Freeman, “Using a light microscope to measure motions with nanometer accuracy,” Opt. Eng. (Bellingham) 37, 1299–1304 (1998).
4.M. R. Hart, R. A. Conant, K. Y. Lau, and R. S. Muller, “Stroboscopic phase-shifting interferometry for dynamic characterization of optical MEMS,” Proc. SPIE 3749, 468–469 (1999).
5.C. Rembe, R. Kant, and R. S. Muller, “Optical measurement methods to study dynamic behaviour in MEMS,” Proc. SPIE 4400, 127–137 (2001).
6.W. Hemmert, M. S. Mermelstein, and D. M. Freeman, “Nanometer resolution of three-dimensional motions using video interference microscopy,” Proceedings of the 12th IEEE conference Micro Electro Mechanical Systems (MEMS) (1999), pp. 302–308.
7.Wyko Surface Profilers—Technical Reference Manual, Wyko Corporation, 1996.
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