Optical microphone principle.
Detailed design of the probe component of the fiber optic microphone.
Overall fiber optic microphone schematic.
Step by step procedure used to micro-machine the thin silicon diaphragm.
Laboratory measured fiber optic microphone response vs frequency (—) cw free-field; (- - -) BK 4221 pressure calibrator; and (↔) pseudo-static measurements.
Measured microphone intrinsic noise levels vs frequency.
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