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/content/avs/journal/bip/11/2/10.1116/1.4948341
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22.The interface position was estimated following Sect. 5.3 of ISO 17109:2015 Surface Chemical Analysis—Depth Profiling—A method for ion sputter rate determination in x-ray photoelectron spectroscopy, Auger electron spectroscopy, and secondary ion mass spectrometry sputter depth profiling using single and multilayer thin films.
23.
23.95% information depth, z95, which corresponds to the sample thickness from which 95% of the detected signal (here measured by XPS) originates; this depth is called information depth in the ISO Vocabulary (ISO 18115-1:2010, term 5.246) and is described by z95 = 3Lcos(theta), with theta the angle of emission and L the electron attenuation length.
http://aip.metastore.ingenta.com/content/avs/journal/bip/11/2/10.1116/1.4948341
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Abstract

The growing interest in artificial bioorganic interfaces as a platform for applications in emerging areas as personalized medicine, clinical diagnostics, biosensing, biofilms, prevention of biofouling, and other fields of bioengineering is the origin of a need for in detail multitechnique characterizations of such layers and interfaces. The in-depth analysis of biointerfaces is of special interest as the properties of functional bioorganic coatings can be dramatically affected by in-depth variations of composition. In worst cases, the functionality of a device produced using such coatings can be substantially reduced or even fully lost.

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