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ISSN: 0022-5355

The Journal of Vacuum Science and Technology is the official publication of the AVS Science & Technology Society, prior to 1983 when the journal was split into JVST A and JVST B.

It is devoted to reports of original research, review articles, and Critical Review articles. Fields of particular interest include Electronic Materials and Processes, Fusion Technology, Surface and Interface Science, Vacuum Metallurgy, and Vacuum Science and Technology.

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Scitation: Journal of Vacuum Science & Technology