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Abstract: Electron-Beam Microfabrication: The Prospects for a Practical System
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10.1116/1.1318506
/content/avs/journal/jvst/10/6/10.1116/1.1318506
http://aip.metastore.ingenta.com/content/avs/journal/jvst/10/6/10.1116/1.1318506
/content/avs/journal/jvst/10/6/10.1116/1.1318506
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/content/avs/journal/jvst/10/6/10.1116/1.1318506
1973-11-01
2014-11-01
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Abstract: Electron-Beam Microfabrication: The Prospects for a Practical System
http://aip.metastore.ingenta.com/content/avs/journal/jvst/10/6/10.1116/1.1318506
10.1116/1.1318506
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