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Proximity effect in electron‐beam lithography
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10.1116/1.568515
/content/avs/journal/jvst/12/6/10.1116/1.568515
http://aip.metastore.ingenta.com/content/avs/journal/jvst/12/6/10.1116/1.568515
/content/avs/journal/jvst/12/6/10.1116/1.568515
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/content/avs/journal/jvst/12/6/10.1116/1.568515
1975-11-01
2014-07-14
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Proximity effect in electron‐beam lithography
http://aip.metastore.ingenta.com/content/avs/journal/jvst/12/6/10.1116/1.568515
10.1116/1.568515
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