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Influence of atomic mixing and preferential sputtering on depth profiles and interfaces
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10.1116/1.569883
/content/avs/journal/jvst/16/2/10.1116/1.569883
http://aip.metastore.ingenta.com/content/avs/journal/jvst/16/2/10.1116/1.569883
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/content/avs/journal/jvst/16/2/10.1116/1.569883
1979-03-01
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Influence of atomic mixing and preferential sputtering on depth profiles and interfaces
http://aip.metastore.ingenta.com/content/avs/journal/jvst/16/2/10.1116/1.569883
10.1116/1.569883
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