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ISSN: 0734-2101
E-ISSN: 1520-8559

Journal of Vacuum Science & Technology A publishes reports of original research, letters, and review articles that focus on fundamental scientific understanding of interfaces, surfaces, plasmas and thin films and on using this understanding to advance the state-of-the-art in various technological applications.

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Editor's Picks

  • Growth, intermixing, and surface phase formation for zinc tin oxide nanolaminates produced by atomic layer deposition
  • Atomic layer deposition of two dimensional MoS2 on 150 mm substrates
  • Zero added oxygen for high quality sputtered ITO: A data science investigation of reduced Sn-content and added Zr
  • Portable ultrahigh-vacuum sample storage system for polarization-dependent total-reflection fluorescence x-ray absorption fine structure spectroscopy
  • Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low Te plasma sources

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ISSN: 0734-2101
E-ISSN: 1520-8559

Agency: AVS: Science & Technology of Materials, Interfaces, and Processing

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  • OAOpen Access Content
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