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ISSN: 0734-2101
E-ISSN: 1520-8559

Journal of Vacuum Science & Technology A publishes reports of original research, letters, and review articles that focus on fundamental scientific understanding of interfaces, surfaces, plasmas and thin films and on using this understanding to advance the state-of-the-art in various technological applications.

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Editor's Picks

  • Atomic layer deposited lithium aluminum oxide: (In)dependency of film properties from pulsing sequence
  • Ag-Pd-Cu alloy inserted transparent indium tin oxide electrodes for organic solar cells
  • Novel strategy for low-temperature, high-rate growth of dense, hard, and stress-free refractory ceramic thin films
  • Transport band gap opening at metal–organic interfaces
  • Monolithic integration of rare-earth oxides and semiconductors for on-silicon technology

Latest Articles

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ISSN: 0734-2101
E-ISSN: 1520-8559

Agency: AVS: Science & Technology of Materials, Interfaces, and Processing

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Scitation: Journal of Vacuum Science & Technology A
http://aip.metastore.ingenta.com/content/avs/journal/jvsta
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