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ISSN: 0734-2101
E-ISSN: 1520-8559

Journal of Vacuum Science & Technology A publishes reports of original research, letters, and review articles that focus on fundamental scientific understanding of interfaces, surfaces, plasmas and thin films and on using this understanding to advance the state-of-the-art in various technological applications.

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  • Diffusion of water into permeation barrier layers
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  • Spatial atomic layer deposition: Performance of low temperature H<span class=2O and O oxidant chemistry for flexible electronics encapsulation" title="Spatial atomic layer deposition: Performance of low temperature HO and O oxidant chemistry for flexible electronics encapsulation" />
  • Overview of atomic layer etching in the semiconductor industry
  • <span class=In situ process monitoring during multistage coevaporation of CuZnSnS thin films" title=" process monitoring during multistage coevaporation of CuZnSnS thin films" />

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ISSN: 0734-2101
E-ISSN: 1520-8559

Agency: AVS: Science & Technology of Materials, Interfaces, and Processing

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Scitation: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
http://aip.metastore.ingenta.com/content/avs/journal/jvsta
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