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ISSN: 0734-2101
E-ISSN: 1520-8559

Journal of Vacuum Science & Technology A publishes reports of original research, letters, and review articles that focus on fundamental scientific understanding of interfaces, surfaces, plasmas and thin films and on using this understanding to advance the state-of-the-art in various technological applications.

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Editor's Picks

  • Atomic and electronic structure of exfoliated black phosphorus
  • Novel hard, tough HfAlSiN multilayers, defined by alternating Si bond structure, deposited using modulated high-flux, low-energy ion irradiation of the growing film
  • β-(AlxGa1−x)2O3/Ga2O3 (010) heterostructures grown on β-Ga2O3 (010) substrates by plasma-assisted molecular beam epitaxy
  • Diffusion of water into permeation barrier layers
  • Topographic and electronic structure of cleaved SrTiO3(001) surfaces

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ISSN: 0734-2101
E-ISSN: 1520-8559

Agency: AVS: Science & Technology of Materials, Interfaces, and Processing

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Scitation: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
http://aip.metastore.ingenta.com/content/avs/journal/jvsta
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