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ISSN: 0734-2101
E-ISSN: 1520-8559

Journal of Vacuum Science & Technology A publishes reports of original research, letters, and review articles that focus on fundamental scientific understanding of interfaces, surfaces, plasmas and thin films and on using this understanding to advance the state-of-the-art in various technological applications.

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Editor's Picks

  • Zero added oxygen for high quality sputtered ITO: A data science investigation of reduced Sn-content and added Zr
  • Portable ultrahigh-vacuum sample storage system for polarization-dependent total-reflection fluorescence x-ray absorption fine structure spectroscopy
  • Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low Te plasma sources
  • Novel chemoresistive CH4 sensor with 10 ppm sensitivity based on multiwalled carbon nanotubes functionalized with SnO2 nanocrystals
  • Atomic layer deposition of environmentally benign SnTiOx as a potential ferroelectric material

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ISSN: 0734-2101
E-ISSN: 1520-8559

Agency: AVS: Science & Technology of Materials, Interfaces, and Processing

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  • OAOpen Access Content
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