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Low temperature etch chuck: Modeling and experimental results of heat transfer and wafer temperature
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10.1116/1.578203
/content/avs/journal/jvsta/10/4/10.1116/1.578203
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/10/4/10.1116/1.578203
/content/avs/journal/jvsta/10/4/10.1116/1.578203
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/content/avs/journal/jvsta/10/4/10.1116/1.578203
1992-07-01
2014-08-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Low temperature etch chuck: Modeling and experimental results of heat transfer and wafer temperature
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/10/4/10.1116/1.578203
10.1116/1.578203
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