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Deposition of gallium oxide and indium oxide on GaAs for in situ process use by alternating supply of TEGa, TMIn, and H2O2 as surge pulses
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10.1116/1.578905
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    Affiliations:
    1 The Institute of Physical and Chemical Research (RIKEN), 2‐1 Hirosawa, Wako, Saitama 351‐01, Japan
    2 Structure and Functional Property Group, PRESTO, Research Development Corporation of Japan (JRDC), c/o Tsukuba Research Consortium, 5‐9‐1 Tokodai, Tsukuba 300‐26, Japan
    3 The Institute of Physical and Chemical Research (RIKEN), 2‐1 Hirosawa, Wako, Saitama 351‐01, Japan
    4 Microelectronics R&D Center, Chinese Academy of Sciences, Beijing 100010, People’s Republic of China
    5 The Institute of Physical and Chemical Research (RIKEN), 2‐1 Hirosawa, Wako, Saitama 351‐01, Japan
    J. Vac. Sci. Technol. A 12, 120 (1994); http://dx.doi.org/10.1116/1.578905
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/content/avs/journal/jvsta/12/1/10.1116/1.578905
1994-01-01
2014-09-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Deposition of gallium oxide and indium oxide on GaAs for insitu process use by alternating supply of TEGa, TMIn, and H2O2 as surge pulses
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/12/1/10.1116/1.578905
10.1116/1.578905
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