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Silicon shot gas epitaxy: Dose‐controlled digital epitaxy
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10.1116/1.579076
/content/avs/journal/jvsta/12/4/10.1116/1.579076
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/12/4/10.1116/1.579076
/content/avs/journal/jvsta/12/4/10.1116/1.579076
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/content/avs/journal/jvsta/12/4/10.1116/1.579076
1994-07-01
2015-07-03
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Silicon shot gas epitaxy: Dose‐controlled digital epitaxy
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/12/4/10.1116/1.579076
10.1116/1.579076
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