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Oxidation of TiN in an oxygen plasma asher
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10.1116/1.579191
/content/avs/journal/jvsta/12/4/10.1116/1.579191
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/12/4/10.1116/1.579191
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/content/avs/journal/jvsta/12/4/10.1116/1.579191
1994-07-01
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Oxidation of TiN in an oxygen plasma asher
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/12/4/10.1116/1.579191
10.1116/1.579191
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