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Silicon oxide deposition in an electron cyclotron resonance plasma with microwave spectroscopic monitoring of SiO
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10.1116/1.579492
/content/avs/journal/jvsta/13/5/10.1116/1.579492
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/13/5/10.1116/1.579492
/content/avs/journal/jvsta/13/5/10.1116/1.579492
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/content/avs/journal/jvsta/13/5/10.1116/1.579492
1995-09-01
2014-10-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Silicon oxide deposition in an electron cyclotron resonance plasma with microwave spectroscopic monitoring of SiO
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/13/5/10.1116/1.579492
10.1116/1.579492
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