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Comprehensive interpretation of the preferred orientation of vapor‐phase grown polycrystalline silicon films
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10.1116/1.579514
/content/avs/journal/jvsta/13/5/10.1116/1.579514
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/13/5/10.1116/1.579514
/content/avs/journal/jvsta/13/5/10.1116/1.579514
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/content/avs/journal/jvsta/13/5/10.1116/1.579514
1995-09-01
2014-11-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Comprehensive interpretation of the preferred orientation of vapor‐phase grown polycrystalline silicon films
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/13/5/10.1116/1.579514
10.1116/1.579514
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