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Dust formation and charging in an Ar/SiH4 radio‐frequency discharge
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10.1116/1.580144
/content/avs/journal/jvsta/14/2/10.1116/1.580144
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/14/2/10.1116/1.580144
/content/avs/journal/jvsta/14/2/10.1116/1.580144
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/content/avs/journal/jvsta/14/2/10.1116/1.580144
1996-03-01
2014-12-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Dust formation and charging in an Ar/SiH4 radio‐frequency discharge
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/14/2/10.1116/1.580144
10.1116/1.580144
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