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A multilevel approach to the control of a chemical–mechanical planarization process
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10.1116/1.580358
/content/avs/journal/jvsta/14/3/10.1116/1.580358
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/14/3/10.1116/1.580358
/content/avs/journal/jvsta/14/3/10.1116/1.580358
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/content/avs/journal/jvsta/14/3/10.1116/1.580358
1996-05-01
2014-12-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: A multilevel approach to the control of a chemical–mechanical planarization process
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/14/3/10.1116/1.580358
10.1116/1.580358
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