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Characteristics of hydrogenated aluminum nitride films prepared by radio frequency reactive sputtering and their application to surface acoustic wave devices
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10.1116/1.580496
/content/avs/journal/jvsta/15/2/10.1116/1.580496
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/15/2/10.1116/1.580496
/content/avs/journal/jvsta/15/2/10.1116/1.580496
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/content/avs/journal/jvsta/15/2/10.1116/1.580496
1997-03-01
2014-07-11
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Characteristics of hydrogenated aluminum nitride films prepared by radio frequency reactive sputtering and their application to surface acoustic wave devices
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/15/2/10.1116/1.580496
10.1116/1.580496
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