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Use of laser reflectometry for end-point detection during the etching of magnetic thin films
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10.1116/1.580610
/content/avs/journal/jvsta/15/4/10.1116/1.580610
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/15/4/10.1116/1.580610
/content/avs/journal/jvsta/15/4/10.1116/1.580610
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/content/avs/journal/jvsta/15/4/10.1116/1.580610
1997-07-01
2014-12-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Use of laser reflectometry for end-point detection during the etching of magnetic thin films
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/15/4/10.1116/1.580610
10.1116/1.580610
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