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Characterization of arclike Ti vapor plasma on the high-voltage electron-beam evaporator
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10.1116/1.580947
/content/avs/journal/jvsta/15/5/10.1116/1.580947
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/15/5/10.1116/1.580947
/content/avs/journal/jvsta/15/5/10.1116/1.580947
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/content/avs/journal/jvsta/15/5/10.1116/1.580947
1997-09-01
2014-10-01
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Characterization of arclike Ti vapor plasma on the high-voltage electron-beam evaporator
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/15/5/10.1116/1.580947
10.1116/1.580947
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