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Improved growth and thermal stability of Parylene films
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10.1116/1.580858
/content/avs/journal/jvsta/15/6/10.1116/1.580858
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/15/6/10.1116/1.580858
/content/avs/journal/jvsta/15/6/10.1116/1.580858
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/content/avs/journal/jvsta/15/6/10.1116/1.580858
1997-11-01
2014-09-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Improved growth and thermal stability of Parylene films
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/15/6/10.1116/1.580858
10.1116/1.580858
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