1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
The full text of this article is not currently available.
Proposal for an etching mechanism of InP in mixtures based on plasma diagnostics and surface analysis
Rent:
Rent this article for
USD
10.1116/1.581186
/content/avs/journal/jvsta/16/3/10.1116/1.581186
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/16/3/10.1116/1.581186
/content/avs/journal/jvsta/16/3/10.1116/1.581186
Loading

Data & Media loading...

Loading

Article metrics loading...

/content/avs/journal/jvsta/16/3/10.1116/1.581186
1998-05-01
2014-10-24
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Proposal for an etching mechanism of InP in CH4-H2 mixtures based on plasma diagnostics and surface analysis
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/16/3/10.1116/1.581186
10.1116/1.581186
SEARCH_EXPAND_ITEM