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Radial profile of energetic particles bombarding the substrate in a glow discharge
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10.1116/1.581614
/content/avs/journal/jvsta/17/2/10.1116/1.581614
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/17/2/10.1116/1.581614
/content/avs/journal/jvsta/17/2/10.1116/1.581614
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/content/avs/journal/jvsta/17/2/10.1116/1.581614
1999-03-01
2014-08-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Radial profile of energetic particles bombarding the substrate in a glow discharge
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/17/2/10.1116/1.581614
10.1116/1.581614
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