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Spectrophotometric analysis of aluminum nitride thin films
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10.1116/1.582035
/content/avs/journal/jvsta/17/3/10.1116/1.582035
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/17/3/10.1116/1.582035
/content/avs/journal/jvsta/17/3/10.1116/1.582035
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/content/avs/journal/jvsta/17/3/10.1116/1.582035
1999-05-01
2014-10-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Spectrophotometric analysis of aluminum nitride thin films
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/17/3/10.1116/1.582035
10.1116/1.582035
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