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Platinum etching using a hard mask in an plasma
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10.1116/1.582264
/content/avs/journal/jvsta/18/3/10.1116/1.582264
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/18/3/10.1116/1.582264
/content/avs/journal/jvsta/18/3/10.1116/1.582264
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/content/avs/journal/jvsta/18/3/10.1116/1.582264
2000-05-01
2014-10-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Platinum etching using a TiO2 hard mask in an O2/Cl2/Ar plasma
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/18/3/10.1116/1.582264
10.1116/1.582264
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