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Adhesion improvement of cubic BN:C film synthesized by a helicon wave plasma chemical vapor deposition process
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10.1116/1.582273
/content/avs/journal/jvsta/18/3/10.1116/1.582273
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/18/3/10.1116/1.582273
/content/avs/journal/jvsta/18/3/10.1116/1.582273
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/content/avs/journal/jvsta/18/3/10.1116/1.582273
2000-05-01
2014-10-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Adhesion improvement of cubic BN:C film synthesized by a helicon wave plasma chemical vapor deposition process
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/18/3/10.1116/1.582273
10.1116/1.582273
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