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Novel method for absolute quantification of the flux and angular distribution of a radical source for atomic hydrogen
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10.1116/1.582289
/content/avs/journal/jvsta/18/3/10.1116/1.582289
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/18/3/10.1116/1.582289
/content/avs/journal/jvsta/18/3/10.1116/1.582289
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/content/avs/journal/jvsta/18/3/10.1116/1.582289
2000-05-01
2014-11-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Novel method for absolute quantification of the flux and angular distribution of a radical source for atomic hydrogen
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/18/3/10.1116/1.582289
10.1116/1.582289
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