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Interactions between plasmas in ionized physical vapor deposition discharges
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10.1116/1.1286360
/content/avs/journal/jvsta/18/5/10.1116/1.1286360
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/18/5/10.1116/1.1286360
/content/avs/journal/jvsta/18/5/10.1116/1.1286360
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/content/avs/journal/jvsta/18/5/10.1116/1.1286360
2000-09-01
2014-10-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Interactions between plasmas in ionized physical vapor deposition discharges
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/18/5/10.1116/1.1286360
10.1116/1.1286360
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