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Three-dimensional simulation of film microstructure produced by glancing angle deposition
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10.1116/1.1286394
/content/avs/journal/jvsta/18/5/10.1116/1.1286394
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/18/5/10.1116/1.1286394
/content/avs/journal/jvsta/18/5/10.1116/1.1286394
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/content/avs/journal/jvsta/18/5/10.1116/1.1286394
2000-09-01
2014-11-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Three-dimensional simulation of film microstructure produced by glancing angle deposition
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/18/5/10.1116/1.1286394
10.1116/1.1286394
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