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Structural and mechanical characterization of fluorinated amorphous-carbon films deposited by plasma decomposition of gas mixtures
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10.1116/1.1289540
/content/avs/journal/jvsta/18/5/10.1116/1.1289540
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/18/5/10.1116/1.1289540
/content/avs/journal/jvsta/18/5/10.1116/1.1289540
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/content/avs/journal/jvsta/18/5/10.1116/1.1289540
2000-09-01
2014-11-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Structural and mechanical characterization of fluorinated amorphous-carbon films deposited by plasma decomposition of CF4–CH4 gas mixtures
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/18/5/10.1116/1.1289540
10.1116/1.1289540
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