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Erratum: “Effects of addition on gas in inductively coupled plasmas for lead zirconate titanate etching” [J. Vac. Sci. Technol. A 18, 1373 (2000)]
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10.1116/1.1319316
/content/avs/journal/jvsta/18/6/10.1116/1.1319316
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/18/6/10.1116/1.1319316
/content/avs/journal/jvsta/18/6/10.1116/1.1319316
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/content/avs/journal/jvsta/18/6/10.1116/1.1319316
2000-11-01
2014-11-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Erratum: “Effects of BCl3 addition on Ar/Cl2 gas in inductively coupled plasmas for lead zirconate titanate etching” [J. Vac. Sci. Technol. A 18, 1373 (2000)]
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/18/6/10.1116/1.1319316
10.1116/1.1319316
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