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Theoretical and experimental characterization of a low-pressure rf plasma and its optimization in electron-gas secondary-neutral mass spectrometry
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10.1116/1.1329117
/content/avs/journal/jvsta/19/1/10.1116/1.1329117
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/19/1/10.1116/1.1329117
/content/avs/journal/jvsta/19/1/10.1116/1.1329117
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/content/avs/journal/jvsta/19/1/10.1116/1.1329117
2001-01-01
2015-08-04
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Theoretical and experimental characterization of a low-pressure rf plasma and its optimization in electron-gas secondary-neutral mass spectrometry
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/19/1/10.1116/1.1329117
10.1116/1.1329117
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