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Effects of electron-beam irradiation on the properties of CN thin films deposited by direct dual ion beams
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10.1116/1.1330256
/content/avs/journal/jvsta/19/1/10.1116/1.1330256
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/19/1/10.1116/1.1330256
/content/avs/journal/jvsta/19/1/10.1116/1.1330256
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/content/avs/journal/jvsta/19/1/10.1116/1.1330256
2001-01-01
2014-12-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effects of electron-beam irradiation on the properties of CN thin films deposited by direct dual ion beams
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/19/1/10.1116/1.1330256
10.1116/1.1330256
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