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Technology and realization of metallic curved waveguide mirrors in polymer film waveguides based on anisotropic plasma etching
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10.1116/1.1335839
/content/avs/journal/jvsta/19/1/10.1116/1.1335839
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/19/1/10.1116/1.1335839
/content/avs/journal/jvsta/19/1/10.1116/1.1335839
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/content/avs/journal/jvsta/19/1/10.1116/1.1335839
2001-01-01
2014-08-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Technology and realization of metallic curved waveguide mirrors in polymer film waveguides based on anisotropic plasma etching
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/19/1/10.1116/1.1335839
10.1116/1.1335839
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