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Optimization of in situ substrate surface treatment in a cathodic arc plasma: A study by TEM and plasma diagnostics
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10.1116/1.1349726
/content/avs/journal/jvsta/19/4/10.1116/1.1349726
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/19/4/10.1116/1.1349726
/content/avs/journal/jvsta/19/4/10.1116/1.1349726
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/content/avs/journal/jvsta/19/4/10.1116/1.1349726
2001-07-01
2015-05-04
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Optimization of in situ substrate surface treatment in a cathodic arc plasma: A study by TEM and plasma diagnostics
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/19/4/10.1116/1.1349726
10.1116/1.1349726
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