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Synthesis of composite films by multisource plasma chemical vapor deposition
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10.1116/1.1371325
/content/avs/journal/jvsta/19/5/10.1116/1.1371325
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/19/5/10.1116/1.1371325
/content/avs/journal/jvsta/19/5/10.1116/1.1371325
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/content/avs/journal/jvsta/19/5/10.1116/1.1371325
2001-09-01
2015-01-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Synthesis of BNx–SiNy composite films by multisource plasma chemical vapor deposition
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/19/5/10.1116/1.1371325
10.1116/1.1371325
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