1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
The full text of this article is not currently available.
Electrical properties of silicon nitride films prepared by electron cyclotron resonance assisted sputter deposition
Rent:
Rent this article for
USD
10.1116/1.1374631
/content/avs/journal/jvsta/19/5/10.1116/1.1374631
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/19/5/10.1116/1.1374631
/content/avs/journal/jvsta/19/5/10.1116/1.1374631
Loading

Data & Media loading...

Loading

Article metrics loading...

/content/avs/journal/jvsta/19/5/10.1116/1.1374631
2001-09-01
2015-03-02
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Electrical properties of silicon nitride films prepared by electron cyclotron resonance assisted sputter deposition
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/19/5/10.1116/1.1374631
10.1116/1.1374631
SEARCH_EXPAND_ITEM